I hope you didn't try to clean the AFM with any cleaning problems... it's not what's generally referred to as a MAF and MAF safe cleaners are NOT save for use with a KV AFM which is what you've got.
Have you checked for error codes?
http://www.cygnusx1.net/Supra/TechTi...ror_codes.aspx
Check for leaks in all of the piping after the AFM.